Sputtered platinum thin films for resistive hydrogen sensor application

Erdem Sennik; Ürdem, Şeyma; Erkovan, Mustafa; Necmettin Kilinc

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dc.contributor.authors	Sennik, E; Urdem, S; Erkovan, M; Kilinc, N;
dc.date.accessioned	2020-10-16T11:09:50Z
dc.date.available	2020-10-16T11:09:50Z
dc.date.issued	2016
dc.identifier.citation	Sennik, E; Urdem, S; Erkovan, M; Kilinc, N; (2016). Sputtered platinum thin films for resistive hydrogen sensor application. MATERIALS LETTERS, 177, 107-104
dc.identifier.issn	0167-577X
dc.identifier.uri	https://doi.org/10.1016/j.matlet.2016.04.134
dc.identifier.uri	https://hdl.handle.net/20.500.12619/69821
dc.description.abstract	This work presents hydrogen (H-2) sensing properties of platinum (Pt) thin film deposited on glass substrate by sputter technique. The Pt thin films with different thickness prepared using RF sputtering method were characterized by the XRD, SEM and XPS techniques. Temperature dependent resistances and the gas measurements of the Pt thin films were investigated under a dry air flow at a temperature range from 30 degrees C to 200 degrees C. The H-2 sensing properties of Pt thin film sensors were also examined in the concentration range of 0.1-1% H-2. The results revealed that the Pt thin film with 2 nm thickness exhibited the best sensing performance to H-2 at 30 degrees C under dry air flow. (C) 2016 Elsevier B.V. All rights reserved.
dc.language	English
dc.publisher	ELSEVIER SCIENCE BV
dc.subject	Physics
dc.title	Sputtered platinum thin films for resistive hydrogen sensor application
dc.type	Article
dc.identifier.volume	177
dc.identifier.startpage	104
dc.identifier.endpage	107
dc.contributor.department	Sakarya Üniversitesi/Mühendislik Fakültesi/Metalurji Ve Malzeme Mühendisliği Bölümü
dc.contributor.saüauthor	Ürdem, Şeyma
dc.contributor.saüauthor	Erkovan, Mustafa
dc.relation.journal	MATERIALS LETTERS
dc.identifier.wos	WOS:000376532200026
dc.identifier.doi	10.1016/j.matlet.2016.04.134
dc.identifier.eissn	1873-4979
dc.contributor.author	Erdem Sennik
dc.contributor.author	Ürdem, Şeyma
dc.contributor.author	Erkovan, Mustafa
dc.contributor.author	Necmettin Kilinc