Sputtered platinum thin films for resistive hydrogen sensor application

Abstract

This work presents hydrogen (H-2) sensing properties of platinum (Pt) thin film deposited on glass substrate by sputter technique. The Pt thin films with different thickness prepared using RF sputtering method were characterized by the XRD, SEM and XPS techniques. Temperature dependent resistances and the gas measurements of the Pt thin films were investigated under a dry air flow at a temperature range from 30 degrees C to 200 degrees C. The H-2 sensing properties of Pt thin film sensors were also examined in the concentration range of 0.1-1% H-2. The results revealed that the Pt thin film with 2 nm thickness exhibited the best sensing performance to H-2 at 30 degrees C under dry air flow. (C) 2016 Elsevier B.V. All rights reserved.