Browsing Elektrik - Elektronik Mühendisliği / Electrical and Electronics Engineering by Author "Helhel, S; Ellingboe, AR; Cerezci, O; Gaman, C;"

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Plasma density measurements of confined capacitively coupled plasma by microwave interferometer and ion energy distribution function methods

Çerezci, Osman (SPRINGER/PLENUM PUBLISHERS, 2006)

Measurements of hydrogen plasma density, are made in a symmetric single frequency confined capacitively coupled plasma (C-CCP) RF system. Comparison is made between density measured by microwave interferometer (MWI) and ...