The influence of the ion bombardment conditions on the oxidation behavior of sputtered TiN coatings

Üstel, Fatih

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dc.contributor.authors	Ustel, F; Mayrhofer, PH; Mitterer, C;
dc.date.accessioned	2020-10-16T11:46:36Z
dc.date.available	2020-10-16T11:46:36Z
dc.date.issued	2002
dc.identifier.citation	Ustel, F; Mayrhofer, PH; Mitterer, C; (2002). The influence of the ion bombardment conditions on the oxidation behavior of sputtered TiN coatings. PRAKTISCHE METALLOGRAPHIE-PRACTICAL METALLOGRAPHY, 39, 598-587
dc.identifier.issn	0032-678X
dc.identifier.uri	https://hdl.handle.net/20.500.12619/70199
dc.description.abstract	In this investigation, the oxidation behavior of TiN coatings deposited by non-reactive unbalanced d.c. magnetron sputtering from TiN targets at different ion bombardment conditions was investigated. The oxidation behavior of the coatings was determined by means of thermogravimetric analysis (TGA) and differential scanning calorimetry (DSC). The samples were characterized by scanning electron microscopy (SEM), energy-dispersive X-ray analysis (EDX) and X-ray diffraction (XRD). The results obtained indicate that the oxidation behavior of the coatings is related to its microstructure and morphology where coatings with fine-grained dense structures showed the best resistance against oxidation.
dc.language	English
dc.publisher	CARL HANSER VERLAG
dc.subject	Metallurgy & Metallurgical Engineering
dc.title	The influence of the ion bombardment conditions on the oxidation behavior of sputtered TiN coatings
dc.type	Article
dc.identifier.volume	39
dc.identifier.startpage	587
dc.identifier.endpage	598
dc.contributor.department	Sakarya Üniversitesi/Mühendislik Fakültesi/Metalurji Ve Malzeme Mühendisliği Bölümü
dc.contributor.saüauthor	Üstel, Fatih
dc.relation.journal	PRAKTISCHE METALLOGRAPHIE-PRACTICAL METALLOGRAPHY
dc.identifier.wos	WOS:000184550400003
dc.contributor.author	Üstel, Fatih