Browsing Mühendislik Fakültesi by Author "Ustel, F; Mayrhofer, PH; Mitterer, C;"

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The influence of the ion bombardment conditions on the oxidation behavior of sputtered TiN coatings

Üstel, Fatih (CARL HANSER VERLAG, 2002)

In this investigation, the oxidation behavior of TiN coatings deposited by non-reactive unbalanced d.c. magnetron sputtering from TiN targets at different ion bombardment conditions was investigated. The oxidation behavior ...